Features

1. Simultaneous/Multifunctional Analysis:

• Raman measurements
• Luminiscent measurements
• Laser Reflection and Transmission Measurements
• 3D high-contrast images in reflected light
• 3D Raman confocal measurements
• Information about spectral and polarization propertis of a sample

1. Spatial resolution:

• horizontal up to 200 nm
• axial up to 500 nm

1. Wide spectral range:

• 785nm: spectral range 50 - 3700cm^-1
• 633nm: spectral range 60 - 6700cm^-1
• 488nm: spectral range 150 - 10000cm^-1

1. Simultaneous use of up to 5 lasers by switching over the components inside the system.
2. The scanning system provides, alongside with point-to-point scanning, fast scanning (1000x1000 pixel per 3 seconds) of a specimen with PMT signal registration.
   The scanning area: 130x130 µm
3. Specially designed monochromator-spectrograph with unique parameters:

spectral resolution up to 0.006 nm

astigmatism less than 5 µm

4. Use of inverted and upright microscopes is possible.
5. Telescope with variable magnification for adapting laser beams to entrance pupils of microobjectives from 3 to 12 mm.
6. Polarized measurements.
7. High sensitivity at low power of laser excitation (from µW to mW).
8. Reflection module for simultaneous obtaining of 3D image in reflected light.
9. Transmission measurements option.
10. Fully automated control of the system.
11. High temporal and temperature stability is provided by modular rigid and rod design.
12. No fiber optics that decrease some optical parameters (transmission, wave front, polarization).
13. Ring illumination for combination with AFM.

Signal decrease from 90 % to 10 % at 200 nm,  λ=514 nm, 100Х immersion lens

Resolution along Z-axis.
The reflection from silicon wafer, obtained by moving the objective lens along the Z axis.
FW HW - 442 nm, λ=488 nm, 100x objective lens.

Specially designed monochromator-spectrograph with unique parameters:
spectral resolution up to 0.006 nm, astigmatism less than 5 µm.
Absolute wavelength accuracy: about 0.016 nm
(for grating 2400 l/mm).
Pinhole spectral image at CCD camera.
Pixel size: 12 µm.
Pinhole size: 12 µm. Image size: 1.5 pixel

Raman spectrum of Si wafer. Si (4) peak is clearly detected. Si (1) and Si (2) are in deep saturation. Confocal mode. Accumulation time - 60 seconds.
488 nm laser, 5 mW power